Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling. - Roland Biberger; Guenther Benstetter; Thomas Schweinböck; Peter Breitschopf; Holger Goebel (Microelectron. Reliab., 2008)

Displacement current sensor for contact and intermittent contact scanning capacitance microscopy. - Roland Biberger; Guenther Benstetter; Holger Goebel (Microelectron. Reliab., 2009)

Intermittent-contact capacitance spectroscopy - A new method for determining C(V) curves with sub-micron lateral resolution. - Roland Biberger; Guenther Benstetter; Holger Goebel; Alexander Hofer (Microelectron. Reliab., 2010)

Scanning probe microscopy based electrical characterization of thin dielectric and organic semiconductor films. - Alexander Hofer; Roland Biberger; Günther Benstetter; Björn Wilke; Holger Göbel (Microelectron. Reliab., 2013)