Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride. - Katja Meinel; Chris Stoeckel; Marcel Melzer; Sven Zimmermann; Roman Forke; Karla Hiller; Thomas Otto (IEEE SENSORS, 2019)

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride. - Katja Meinel; Marcel Melzer; Chris Stoeckel; Alexey Shaporin; Roman Forke; Sven Zimmermann; Karla Hiller; Thomas Otto; Harald Kuhn (Sensors, 2020)