Design and implementation of an intelligent prognostics system. - Yu-Chuan Su; Fan-Tien Cheng; Min-Hsiung Hung; Yen-Chang Lin; Rung-Chuan Lin (CASE, 2005)

A Virtual Metrology Scheme for Predicting CVD Thickness in Semiconductor Manufacturing. - Tung-Ho Lin; Min-Hsiung Hung; Rung-Chuan Lin; Fan-Tien Cheng (ICRA, 2006)