Transforming Computational Lithography with AC and AI - Faster, More Accurate, and Energy-efficient. - Saumyadip Mukhopadhyay; Kiho Yang; Kasyap Thottasserymana Vasudevan; Mounica Jyothi Divvela; Selim Dogru; Dilip Krishnamurthy; Fergo Treska; Werner Gillijns; Ryan Ryoung Han Kim; Kumara Sastry; Vivek Singh (CoRR, 2026)