Cell Library Development Methodology for Throughput Enhancement of Electron Beam Direct-Write Lithography Systems. - Makoto Sugihara; Taiga Takata; Kenta Nakamura; Ryoichi Inanami; Hiroaki Hayashi; Katsumi Kishimoto; Tetsuya Hasebe; Yukihiro Kawano; Yusuke Matsunaga; Kazuaki J. Murakami; Katsuya Okumura (SoC, 2005)

A character size optimization technique for throughput enhancement of character projection lithography. - Makoto Sugihara; Taiga Takata; Kenta Nakamura; Ryoichi Inanami; Hiroaki Hayashi; Katsumi Kishimoto; Tetsuya Hasebe; Yukihiro Kawano; Yusuke Matsunaga; Kazuaki J. Murakami; Katsuya Okumura (ISCAS, 2006)

Cell Library Development Methodology for Throughput Enhancement of Character Projection Equipment. - Makoto Sugihara; Taiga Takata; Kenta Nakamura; Ryoichi Inanami; Hiroaki Hayashi; Katsumi Kishimoto; Tetsuya Hasebe; Yukihiro Kawano; Yusuke Matsunaga; Kazuaki J. Murakami; Katsuya Okumura (IEICE Trans. Electron., 2006)