Advanced dry etching of GaAs/AlGaAs multilayer wafer with InAs quantum dot for circular defect in photonic crystal laser. - Yuki Adachi; Yifan Xiong; Hanqiao Ye; Rubing Zuo; Masaya Morita; Kenta Kaichi; Ryosei Kinoshita; Masato Morifuji; Akihiro Maruta; Hirotake Kajii; Masahiko Kondow (IEICE Electron. Express, 2023)