Feedback control of thin film growth in an HPCVD reactor via reduced order models. - H. T. Banks; S. C. Beeler; Grace M. Kepler; Hien T. Tran (CDC, 2001)

Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor. - Grace M. Kepler; H. T. Banks; Hien T. Tran; S. C. Beeler (SIAM J. Appl. Math., 2002)