Comprehensive 300 mm process for Silicon spin qubits with modular integration. - A. Elsayed; Clement Godfrin; Nard I. Dumoulin Stuyck; M. M. K. Shehata; Stefan Kubicek; S. Massar; Yann Canvel; Julien Jussot; Andriy Hikavyy; Roger Loo; George Simion; Massimo Mongillo; et al. (VLSI Technology and Circuits, 2023)