Wafer fabrication: 300mm wafer fabrication line simulation model. - Sameer T. Shikalgar; David Fronckowiak; Edward A. MacNair (WSC, 2002)

Process equipment modeling: application of cluster tool modeling to a 300 mm fab simulation. - Sameer T. Shikalgar; David Fronckowiak; Edward A. MacNair (WSC, 2003)

A full-factory simulator as a daily decision-support tool for 300MM wafer fabrication productivity. - Sugato Bagchi; Ching-Hua Chen-Ritzo; Sameer T. Shikalgar; Michael Toner (WSC, 2008)