Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage. - Tom Oomen; Sander Quist; Robbert van Herpen; Okko H. Bosgra (CDC, 2010)

Next-generation wafer stage motion control: Connecting system identification and robust control. - Tom Oomen; Robbert van Herpen; Sander Quist; Marc M. J. van de Wal; Okko H. Bosgra; Maarten Steinbuch (ACC, 2012)

Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage. - Tom Oomen; Robbert van Herpen; Sander Quist; Marc M. J. van de Wal; Okko H. Bosgra; Maarten Steinbuch (IEEE Trans. Control. Syst. Technol., 2014)