Electrostatic actuation of surface/bulk micromachined single-crystal silicon microresonators. - Sangwoo Lee; Sangjun Park 001; Sangwoo Yi; Sangchul Lee; Dong-Il Dan Cho; Byeoungju Ha; Yongsoo Oh; Cimoo Song (IROS, 1999)

Dry And Wet Etching With (111) Silicon For High-Performance Micro And Nano Systems. - Dong-Il Cho; Byoung-Doo Choi; Sangwoo Lee; Seung Joon Paik; Sangjun Park 001; Jaehong Park; Yonghwa Park; Jongpal Kim; Il-Woo Jung (Int. J. Comput. Eng. Sci., 2003)

A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical Combs Fabricated Using The Extended Sacrificial Bulk Micromachining Process. - Dongil Cho; Hyoungho Ko; Jongpal Kim; Sangjun Park 001; Donghun Kwak; Taeyong Song; William Carr; James Bus (Int. J. Comput. Eng. Sci., 2003)

New Vertical Array Actuators Using Extended Sbm And Deep Pn Junction Isolation. - Il-Woo Jung; Jaehong Park; Byoung-Doo Choi; Jongpal Kim; Sangjun Park 001; Seung Joon Paik; Dong-Il Cho (Int. J. Comput. Eng. Sci., 2003)

Extremely Sharp {111}-Bound, Single-Crystalline Silicon Nano Tips. - Jaehong Park; Kidong Park; Seung Joon Paik; Kyo-In Koo; Byoung-Doo Choi; Jongpal Kim; Sangjun Park 001; Il-Woo Jung; Hyoungho Ko; Dong-Il Cho (Int. J. Comput. Eng. Sci., 2003)