TSV optimization for BEOL interconnection in logic process. - Sinwoo Kang; Sungdong Cho; Kiyoung Yun; Sangwook Ji; Kisoon Bae; Woonseob Lee; Eunji Kim; Jangho Kim; Jonghoon Cho; Hyongyol Mun; Yeong L. Park (3DIC, 2011)