Generic lithography modeling with dual-band optics-inspired neural networks. - Haoyu Yang; Zongyi Li; Kumara Sastry; Saumyadip Mukhopadhyay; Mark Kilgard; Anima Anandkumar; Brucek Khailany; Vivek Singh; Haoxing Ren (DAC, 2022)

Large Scale Mask Optimization Via Convolutional Fourier Neural Operator and Litho-Guided Self Training. - Haoyu Yang; Zongyi Li; Kumara Sastry; Saumyadip Mukhopadhyay; Anima Anandkumar; Brucek Khailany; Vivek Singh; Haoxing Ren (CoRR, 2022)

An Adversarial Active Sampling-based Data Augmentation Framework for Manufacturable Chip Design. - Mingjie Liu; Haoyu Yang; Zongyi Li; Kumara Sastry; Saumyadip Mukhopadhyay; Selim Dogru; Anima Anandkumar; David Z. Pan; Brucek Khailany; Haoxing Ren (CoRR, 2022)