Silicon Thinning and Polishing on Packaged Devices. - Felix Beaudoin; Philippe Perdu; Romain Desplats; Sebastien Rigo; Dean Lewis (Microelectron. Reliab., 2001)

The advent of MEMS in space. - Xavier Lafontan; Francis Pressecq; Felix Beaudoin; Sebastien Rigo; M. Dardalhon; J.-L. Roux; Petra Schmitt; J. Kuchenbecker; B. Baradat; Djemel Lellouchi (Microelectron. Reliab., 2003)

Correlation between X-ray micro-diffraction and a developed analytical model to measure the residual stresses in suspended structures in MEMS. - Sebastien Rigo; Phillippe Goudeau; Jean-Michel Desmarres; Talal Masri; Jacques-Alain Petit; Petra Schmitt (Microelectron. Reliab., 2003)