Process Improvements for 7th Generation 1Tb Quad-Level Cell 3D NAND Flash Memory in Mass Production. - Soochan Chung; Dong-Hyeon Ko; Joonsung Lim; Kyungmoon Kim; Sejie Takaki; Yujeong Seo; Byoungil Lee; Sejun Park; Jaeduk Lee; Kyungyoon Noh; Sujin Ahn; Sunghoi Hur (IMW, 2023)