MEMS Biomimetic Acoustic Pressure Gradient Sensitive Structure for Sound Source Localization. - Peng An; Weizheng Yuan; Sen Ren (Sensors, 2009)

A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure. - Sen Ren; Weizheng Yuan; Dayong Qiao; Jinjun Deng; Xiaodong Sun (Sensors, 2013)

Microfabricated SOI pressure sensor using dynamically balanced lateral resonator. - Sen Ren; Weizheng Yuan; Xiaodong Sun; Jinjun Deng; Dayong Qiao; Chengyu Jiang (NEMS, 2014)

A low-noise CMOS interface circuit for resonant pressure sensor. - Xiaodong Sun; Weizheng Yuan; Sen Ren; Jinjun Deng; Chengyu Jiang (NEMS, 2014)

Design and Analysis of a New Tuning Fork Structure for Resonant Pressure Sensor. - Xiaodong Sun; Weizheng Yuan; Dayong Qiao; Ming Sun; Sen Ren (Micromachines, 2016)