A virtual metrology system for semiconductor manufacturing. - Pilsung Kang 001; Hyoungjoo Lee; Sungzoon Cho; Dongil Kim; Jinwoo Park; Chan-Kyoo Park; Seungyong Doh (Expert Syst. Appl., 2009)

Virtual metrology for run-to-run control in semiconductor manufacturing. - Pilsung Kang 001; Dongil Kim; Hyoungjoo Lee; Seungyong Doh; Sungzoon Cho (Expert Syst. Appl., 2011)

Machine learning-based novelty detection for faulty wafer detection in semiconductor manufacturing. - Dongil Kim; Pilsung Kang 001; Sungzoon Cho; Hyoungjoo Lee; Seungyong Doh (Expert Syst. Appl., 2012)

Improvement of virtual metrology performance by removing metrology noises in a training dataset. - Dongil Kim; Pilsung Kang 001; Seung-kyung Lee; Seokho Kang 001; Seungyong Doh; Sungzoon Cho (Pattern Anal. Appl., 2015)