Failure analysis on 14 nm FinFET devices with ESD CDM failure. - Shaalini Chithambaram; Pik Kee Tan; Yuzhe Zhao; Binghai Liu; Yinzhe Ma; Alfred Quah; Dayanand Nagalingam; Yanlin Pan; Zhihong Mai (Microelectron. Reliab., 2018)