Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing. - Ahmad Khaled; Moatassim Raoof; Vladimir Cherman; Karoline Jans; Mohammad Abbas; Shaker Ebrahim; Goerge Bryce; Peter Verheyen; Ann Witvrouw; Ingrid De Wolf (Microelectron. Reliab., 2012)