A simulation-based cost modeling methodology for evaluation of interbay material handling in a semiconductor wafer fab. - Shari Murray; Gerald T. Mackulak; John W. Fowler; Theron Colvin (WSC, 2000)

Modeling methodology: new approaches for simulation of wafer fabrication: the use of control variates and calibration metrics. - Chanettre Rasmidatta; Shari Murray; John W. Fowler; Gerald T. Mackulak (WSC, 2002)