Two-axis scanning micro mirror device with thick film metallic glass Cu-Zr-Ti and Parylene-C. - Shigetaka Watanabe; Yutaka Nakamitsu; Sakurai Junpei; Mizue Mizojiri; Seiichi Hata (MHS, 2014)

Reverse Lift-Off Process and Application for Cu-Zr-Ti Metallic Glass Thick Film Structures. - Shigetaka Watanabe; Junpei Sakurai; Mizue Mizoshiri; Seiichi Hata (Int. J. Autom. Technol., 2015)