An energy harvesting device manufactured using the commercial 0.18 µm CMOS process. - Ching-Liang Dai; Ming-Zhi Yang; Shih-Wen Peng (NEMS, 2013)

Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology. - Shih-Wen Peng; Po-Jen Shih; Ching-Liang Dai (Micromachines, 2015)