Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance. - Shinya Ito; Hiroaki Namba; Tsuyoshi Hirata; Koichi Ando; Shin Koyama; Nobuyuki Ikezawa; Tatsuya Suzuki; Takehiro Saitoh; Tadahiko Horiuchi (Microelectron. Reliab., 2002)