A general-purpose two-dimensional process simulator-OPUS for arbitrary structures. - Kenji Nishi; Kouichi Sakamoto; Shigeki Kuroda; Jun Ueda; Tatsurou Miyoshi; Shintaro Ushio (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1989)

A fast three-dimensional process simulator OPUS/3D with access to two-dimensional simulation results. - Shintaro Ushio; Kenji Nishi; Shigeki Kuroda; Kazuhiko Kai; Jun Ueda (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1990)