Influence of substrate temperature to prepare (1 0 3) oriented AlN films. - Maw-Shung Lee; Sean Wu; Shih-Bin Jhong; Kuan-Ting Liu; Ruyen Ro; Chia-Chi Shih; Zhi-Xun Lin; Kang-I Chen; Shou-Chang Cheng (Microelectron. Reliab., 2010)