Deep Structures Wet Etched Into Lithium Niobate Using A Physical Mask. - Andrew B. Randles; Brett J. Pokines; Shuji Tanaka; Masayoshi Esashi (Int. J. Comput. Eng. Sci., 2003)

Vacuum test of a micro-solid propellant rocket array thruster. - Kazuyuki Kondo; Shuji Tanaka; Hiroto Habu; Shin-ichiro Tokudome; Keiichi Hori; Hirobumi Saito; Akihito Itoh; Masashi Watanabe; Masayoshi Esashi (IEICE Electron. Express, 2004)

Monte Carlo grid for financial risk management. - Shu Tezuka; Hiroki Murata; Shuji Tanaka; Shoji Yumae (Future Gener. Comput. Syst., 2005)

A matched expansion MEMS probe card with low CTE LTCC substrate. - Seong-Hun Choe; Shuji Tanaka; Masayoshi Esashi (ITC, 2007)

Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS. - Bo Wang; Shuji Tanaka; B. Guo; G. Vereecke; Simone Severi; Ann Witvrouw; Martine Wevers; Ingrid De Wolf (Microelectron. Reliab., 2011)

A low phase noise FBAR based multiband VCO design. - Guoqiang Zhang 005; Abhay Kochhar; Keiji Yoshida; Shuji Tanaka; Ken-ya Hashimoto; Masayoshi Esashi; Haruichi Kanaya; Ramesh K. Pokharel (IEICE Electron. Express, 2013)

The methods of maintaining Low frequency stability in FBAR based cross-coupled VCO design. - Guoqiang Zhang 005; Abhay Kochhar; Keiji Yoshida; Shuji Tanaka; Ken-ya Hashimoto; Masayoshi Esashi; Ramesh K. Pokharel (IEICE Electron. Express, 2013)

Automatic identification of lung candidate nodules on chest CT images based on temporal subtraction images. - Shuji Tanaka; Yuriko Ikeda; Hyoungseop Kim; Joo Kooi Tan; Seiji Ishikawa; Seiichi Murakami; Takatoshi Aoki; Rie Tachibana; Yasushi Hirano; Shoji Kido (SCIS&ISIS, 2014)

Wafer-level hermetic MEMS packaging by anodic bonding and its reliability issues. - Shuji Tanaka (Microelectron. Reliab., 2014)

Delay window blind oversampling clock and data recovery algorithm with wide tracking range. - Travis Bartley; Shuji Tanaka; Yutaka Nonomura; Takahiro Nakayama; Masanori Muroyama (ISCAS, 2015)

A1 mode Lamb wave on thin LiTaO3 for high frequency acoustic devices. - Najoua Assila; Michio Kadota; Yuji Ohashi; Shuji Tanaka (NEMS, 2016)

Wafer-level vacuum packaging for hetero-integration by thermo-compression bonding using planarized-electroplated gold bumps. - Muhammad Salman Al Farisi; Hideki Hirano; Shuji Tanaka (NEMS, 2016)

Lamb wave resonators and resonator filters in periodical poled Z-cut LiTaO3 plate. - Michio Kadota; Takashi Ogami; Kansho Yamamoto; Yasuo Cho; Shuji Tanaka (NEMS, 2016)

Electroplating of neodymium iron alloys. - Florian Kurth; Joerg Froemel; Shuji Tanaka; Masayoshi Esashi; Thomas Gessner (NEMS, 2016)

Fabrication of a multilayer spiral coil by selective bonding, debonding and MEMS technologies. - Tim Schroeder; Joerg Froemel; Shuji Tanaka; Thomas Gessner (NEMS, 2016)

A multiple sensor platform with dedicated CMOS-LSIs for robot applications. - Chenzhong Shao; Takahiro Nakayama; Yoshiyuki Hata; Travis Bartley; Yutaka Nonomura; Shuji Tanaka; Masanori Muroyama (NEMS, 2016)

Letter from the general chair. - Shuji Tanaka (NEMS, 2016)

Plasma half dicing based on micro-loading effect for ultra-thin LiNbO3 plate wave devices on Si substrate. - Yoshimi Yunoki; Michio Kadota; Masaaki Moriyama; Shuji Tanaka (NEMS, 2016)

Stacked Integration of MEMS on LSI. - Masayoshi Esashi; Shuji Tanaka (Micromachines, 2016)

System development of biosensing module using CMOS hall sensor array for disposable wireless diagnosis device. - Tong Sun; Takashiro Tsukamoto; Tomohiro Ishikawa; Shuji Tanaka (NEMS, 2017)

A 1.9GHz Low-Phase-Noise Complementary Cross-Coupled FBAR-VCO without Additional Voltage Headroom in 0.18µm CMOS Technology. - Guoqiang Zhang 005; Awinash Anand; Kousuke Hikichi; Shuji Tanaka; Masayoshi Esashi; Ken-ya Hashimoto; Shinji Taniguchi; Ramesh K. Pokharel (IEICE Trans. Electron., 2017)

3-Axis Fully-Integrated Capacitive Tactile Sensor with Flip-Bonded CMOS on LTCC Interposer. - Sho Asano; Masanori Muroyama; Takahiro Nakayama; Yoshiyuki Hata; Yutaka Nonomura; Shuji Tanaka (Sensors, 2017)

A Tactile Sensor Network System Using a Multiple Sensor Platform with a Dedicated CMOS-LSI for Robot Applications. - Chenzhong Shao; Shuji Tanaka; Takahiro Nakayama; Yoshiyuki Hata; Travis Bartley; Yutaka Nonomura; Masanori Muroyama (Sensors, 2017)

Wireless Sensor Chip Platform Using On-Chip Electrochromic Micro Display. - Takashiro Tsukamoto; Yanjun Zhu; Shuji Tanaka (IEICE Trans. Electron., 2018)

Design and Fabrication Technology of Low Profile Tactile Sensor with Digital Interface for Whole Body Robot Skin. - Mitsutoshi Makihata; Masanori Muroyama; Shuji Tanaka; Takahiro Nakayama; Yutaka Nonomura; Masayoshi Esashi (Sensors, 2018)

Electrical Design and Evaluation of Asynchronous Serial Bus Communication Network of 48 Sensor Platform LSIs with Single-Ended I/O for Integrated MEMS-LSI Sensors. - Chenzhong Shao; Shuji Tanaka; Takahiro Nakayama; Yoshiyuki Hata; Masanori Muroyama (Sensors, 2018)

Commercial Production of Low-k PZT film using Sputtering Method. - Mario Kiuchi; Ryoma Miyake; Shinya Yoshida; Shuji Tanaka; Tsuyoshi Takemoto; Yukitaka Yamaguchi; Kenji Komaki (IEEE SENSORS, 2020)

Special Issue on MEMS for Robotics and Mechatronics. - Masayoshi Esashi; Shuji Tanaka; Seiji Aoyagi; Takashi Mineta; Koichi Suzumori; Tetsuji Dohi; Norihisa Miki (J. Robotics Mechatronics, 2020)

Development of a Real-Time Force and Temperature Sensing System with MEMS-LSI Integrated Tactile Sensors for Next-Generation Robots. - Masanori Muroyama; Hideki Hirano; Chenzhong Shao; Shuji Tanaka (J. Robotics Mechatronics, 2020)

Frequency and Quality Factor Matched 2-Axis Dual Mass Resonator. - Jianlin Chen; Takashiro Tsukamoto; Giacomo Langfelder; Shuji Tanaka (IEEE SENSORS, 2021)

Dual-Mass Resonator with Dynamically Balanced Structure for Roll/Pitch Rate Integrating Gyroscope. - Shihe Wang; Muhammad Salman Al Farisi; Jianlin Chen; Takashiro Tsukamoto; Shuji Tanaka (IEEE SENSORS, 2021)

Monolithic Fabrication of Film Bulk Acoustic Resonators above Integrated Circuit by Adhesive- Bonding-Based Film Transfer. - Abhay Kochhar; Takeshi Matsumura; Guoqiang Zhang 005; Ramesh K. Pokharel; Ken-ya Hashimoto; Masayoshi Esashi; Shuji Tanaka (IEEE DataPort, 2022)

Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope. - Shihe Wang; Jianlin Chen; Takashiro Tsukamoto; Shuji Tanaka (Sensors, 2023)

PDMS Micro-Patterning on Wafer Based on EtchBack Lift-Off for Microsystems Fabrication. - Xuchen Wang; Yukio Suzuki; Tatsuya Matsumoto; Toshiyuki Kikuta; Chung-Min Li; Shuji Tanaka (IEEE SENSORS, 2024)

A Two-Axis Orthogonal Resonator for Variable Sensitivity Mode Localization Sensing. - Yuta Nagasaka; Alessia Baronchelli; Shuji Tanaka; Takashiro Tsukamoto (Sensors, 2024)