Design-process integration for performance-based OPC framework. - Siew-Hong Teh; Chun-Huat Heng; Arthur Tay (DAC, 2008)

Performance-Based Optical Proximity Correction Methodology. - Siew-Hong Teh; Chun-Huat Heng; Arthur Tay (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 2010)