Particle filtering of hidden Gamma processes for robust Predictive Maintenance in semiconductor manufacturing. - Andrea Schirru; Simone Pampuri; Giuseppe De Nicolao (CASE, 2010)

Multilevel statistical process control of asynchronous multi-stream processes in semiconductor manufacturing. - Andrea Schirru; Simone Pampuri; Giuseppe De Nicolao (CASE, 2010)

Multilevel Lasso applied to Virtual Metrology in semiconductor manufacturing. - Simone Pampuri; Andrea Schirru; Giuseppe Fazio; Giuseppe De Nicolao (CASE, 2011)

Proportional hazard model with ℓ1 Penalization applied to Predictive Maintenance in semiconductor manufacturing. - Simone Pampuri; Andrea Schirru; Cristina De Luca; Giuseppe De Nicolao (CASE, 2011)

Nonparametric Virtual Sensors for Semiconductor Manufacturing - Using Information Theoretic Learning and Kernel Machines. - Andrea Schirru; Simone Pampuri; Cristina De Luca; Giuseppe De Nicolao (ICINCO (2), 2011)

Multistep virtual metrology approaches for semiconductor manufacturing processes. - Simone Pampuri; Andrea Schirru; Gian Antonio Susto; Cristina De Luca; Alessandro Beghi; Giuseppe De Nicolao (CASE, 2012)

An information-theory and Virtual Metrology-based approach to Run-to-Run semiconductor manufacturing control. - Gian Antonio Susto; Andrea Schirru; Simone Pampuri; Giuseppe De Nicolao; Alessandro Beghi (CASE, 2012)

Learning from time series: Supervised Aggregative Feature Extraction. - Andrea Schirru; Gian Antonio Susto; Simone Pampuri; Seán F. McLoone (CDC, 2012)

A predictive maintenance system for integral type faults based on support vector machines: An application to ion implantation. - Gian Antonio Susto; Andrea Schirru; Simone Pampuri; Daniele Pagano; Seán F. McLoone; Alessandro Beghi (CASE, 2013)

Prediction of integral type failures in semiconductor manufacturing through classification methods. - Gian Antonio Susto; Seán F. McLoone; Daniele Pagano; Andrea Schirru; Simone Pampuri; Alessandro Beghi (ETFA, 2013)

Insight extraction for semiconductor manufacturing processes. - Simone Pampuri; Gian Antonio Susto; Jian Wan 002; Adrian B. Johnston; Paul G. O'Hara; Seán F. McLoone (CASE, 2014)

An adaptive machine learning decision system for flexible predictive maintenance. - Gian Antonio Susto; Jian Wan 002; Simone Pampuri; Mattia Zanon; Adrian B. Johnston; Paul G. O'Hara; Seán F. McLoone (CASE, 2014)

A sampling decision system for semiconductor manufacturing: relying on virtual metrology and actual measurements. - Daniel Kurz; Jürgen Pilz; Andrea Schirru; Simone Pampuri; Cristina De Luca (WSC, 2014)

Multi-step virtual metrology for semiconductor manufacturing: A multilevel and regularization methods-based approach. - Gian Antonio Susto; Simone Pampuri; Andrea Schirru; Alessandro Beghi; Giuseppe De Nicolao (Comput. Oper. Res., 2015)

Machine Learning for Predictive Maintenance: A Multiple Classifier Approach. - Gian Antonio Susto; Andrea Schirru; Simone Pampuri; Seán F. McLoone; Alessandro Beghi (IEEE Trans. Ind. Informatics, 2015)

Supervised Aggregative Feature Extraction for Big Data Time Series Regression. - Gian Antonio Susto; Andrea Schirru; Simone Pampuri; Seán F. McLoone (IEEE Trans. Ind. Informatics, 2016)

A Fraud Detection Decision Support System via Human On-Line Behavior Characterization and Machine Learning. - Gian Antonio Susto; Matteo Terzi; Chiara Masiero; Simone Pampuri; Andrea Schirru (AI4I, 2018)