Towards Fabrication of Next-Generation Physical Sensors Through Integrating Suspended Sub-Micron Silicon Nanowires with Microelectromechanical Systems. - Basit Ali; Mehdi Bostan Shirin; Muhammad Muzammil; Ege Nacarkucuk; Sina Zare Pakzad; Umut Kerimzade; B. Erdem Alaca (IEEE SENSORS, 2024)