Tuneable Capacitor based on dual picks profile of the sacrificial layer - Sofiane Soulimane; Fabrice Casset; François Chapuis; Pierre Louis Charvet; Marc Aïd (CoRR, 2008)

A new experimental methodology using point deflection to quantify residual stress of thin polymer membrane materials in MEMS devices. - Sofiane Soulimane; Arnaud Pouydebasque; Sébastien Bolis; Fabrice Jacquet; Claudine Bridoux; Florian Dupont; Christophe Poulain; Stéphane Moreau; Stephane Fanget (NEMS, 2013)