Cost-effective cleaning and high-quality thin gate oxides. - Marc M. Heyns; Twan Bearda; Ingrid Cornelissen; Stefan De Gendt; Robin Degraeve; Guido Groeseneken; Conny Kenens; D. Martin Knotter; Lee M. Loewenstein; Paul W. Mertens; Sofie Mertens; Marc Meuris; et al. (IBM J. Res. Dev., 1999)

In situ crystallisation in ZrO2 thin films during high temperature X-ray diffraction. - Chao Zhao; Gert Roebben; Hugo Bender; Edward Young; S. Haukka; Michel Houssa; Mohamed Naili; Stefan De Gendt; Marc M. Heyns; Omer Van der Biest (Microelectron. Reliab., 2001)

Observation and characterization of defects in HfO2 high-K gate dielectric layers. - Vidya Kaushik; Martine Claes; Annelies Delabie; Sven Van Elshocht; Olivier Richard; Thierry Conard; Erika Rohr; Thomas Witters; Matty Caymax; Stefan De Gendt (Microelectron. Reliab., 2005)

Modelling mobility degradation due to remote Coulomb scattering from dielectric charges and its impact on MOS device performance. - G. S. Lujan; Wim Magnus; L.-Å. Ragnarsson; Stefan Kubicek; Stefan De Gendt; Marc M. Heyns; Kristin De Meyer (Microelectron. Reliab., 2005)

Negative bias temperature instabilities in HfSiO(N)-based MOSFETs: Electrical characterization and modeling. - M. Houssa; Marc Aoulaiche; Stefan De Gendt; Guido Groeseneken; Marc M. Heyns (Microelectron. Reliab., 2007)

Mechanism of O2-anneal induced Vfb shifts of Ru gated stacks. - Z. Li; Tom Schram; Luigi Pantisano; A. Stesmans; Thierry Conard; S. Shamuilia; V. V. Afanasiev; A. Akheyar; Sven Van Elshocht; D. P. Brunco; W. Deweerd; Y. Naoki; et al. (Microelectron. Reliab., 2007)

Nanoscale and device level electrical behavior of annealed ALD Hf-based gate oxide stacks grown with different precursors. - Albin Bayerl; Mario Lanza; Lidia Aguilera; Marc Porti; Montserrat Nafría; Xavier Aymerich; Stefan De Gendt (Microelectron. Reliab., 2013)

Energy distribution of positive charges in high-k dielectric. - Sharifah Wan Muhamad Hatta; Zhigang Ji; Jianfu Zhang 001; Weidong Zhang 002; Norhayati Soin; Ben Kaczer; Stefan De Gendt; Guido Groeseneken (Microelectron. Reliab., 2014)

Devices and Circuits Using Novel 2-D Materials: A Perspective for Future VLSI Systems. - Giovanni V. Resta; Alessandra Leonhardt; Yashwanth Balaji; Stefan De Gendt; Pierre-Emmanuel Gaillardon; Giovanni De Micheli (IEEE Trans. Very Large Scale Integr. Syst., 2019)

Code Generation Using Machine Learning: A Systematic Review. - Enrique Dehaerne; Bappaditya Dey; Sandip Halder; Stefan De Gendt; Wannes Meert (IEEE Access, 2022)

Optimizing YOLOv7 for Semiconductor Defect Detection. - Enrique Dehaerne; Bappaditya Dey; Sandip Halder; Stefan De Gendt (CoRR, 2023)

A Deep Learning Framework for Verilog Autocompletion Towards Design and Verification Automation. - Enrique Dehaerne; Bappaditya Dey; Sandip Halder; Stefan De Gendt (CoRR, 2023)

YOLOv8 for Defect Inspection of Hexagonal Directed Self-Assembly Patterns: A Data-Centric Approach. - Enrique Dehaerne; Bappaditya Dey; Hossein Esfandiar; Lander Verstraete; Hyo Seon Suh; Sandip Halder; Stefan De Gendt (CoRR, 2023)

SEMI-CenterNet: A Machine Learning Facilitated Approach for Semiconductor Defect Inspection. - Vic De Ridder; Bappaditya Dey; Enrique Dehaerne; Sandip Halder; Stefan De Gendt; Bartel Van Waeyenberge (CoRR, 2023)

Automated Semiconductor Defect Inspection in Scanning Electron Microscope Images: a Systematic Review. - Thibault Lechien; Enrique Dehaerne; Bappaditya Dey; Víctor Blanco; Sandip Halder; Stefan De Gendt (CoRR, 2023)

Benchmarking Feature Extractors for Reinforcement Learning-Based Semiconductor Defect Localization. - Enrique Dehaerne; Bappaditya Dey; Sandip Halder; Stefan De Gendt (CoRR, 2023)

Improving Accuracy and Transferability of Machine Learning Chemical Activation Energies by Adding Electronic Structure Information. - Esteban Marques; Stefan De Gendt; Geoffrey Pourtois; Michiel J. van Setten (J. Chem. Inf. Model., 2023)

Advancing SEM Based Nano-scale Defect Analysis in Semiconductor Manufacturing for Advanced IC Nodes. - Bappaditya Dey; Matthias Monden; Víctor Blanco; Sandip Halder; Stefan De Gendt (ECCV Workshops (4), 2024)

Exploring Machine Learning for Semiconductor Process Optimization: A Systematic Review. - Ying-Lin Chen; Sara Sacchi; Bappaditya Dey; Víctor Blanco; Sandip Halder; Philippe Leray 002; Stefan De Gendt (IEEE Trans. Artif. Intell., 2024)