Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors. - Albena Paskaleva; Martin Lemberger; Stefan Zürcher; Anton J. Bauer; Lothar Frey; Heiner Ryssel (Microelectron. Reliab., 2003)

Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor. - Martin Lemberger; Albena Paskaleva; Stefan Zürcher; Anton J. Bauer; Lothar Frey; Heiner Ryssel (Microelectron. Reliab., 2005)