Advanced Silicon Micromachining. - Thomas Gessner; Andreas Bertz; Christian Lohmann; Steffen Kurth; Karla Hiller (Int. J. Comput. Eng. Sci., 2003)

Parameter Identification of Pressure Sensors by Static and Dynamic Measurements - Steffen Michael; Steffen Kurth; Jens Klattenhoff; Holm Geissler; Siegfried Hering (CoRR, 2008)