CMOS scaling into the 21st century: 0.1 µm and beyond. - Yuan Taur; Yuh-Jier Mii; David J. Frank; H.-S. Philip Wong; Douglas A. Buchanan; Shalom J. Wind; Stephen A. Rishton; Watson A. Sai-Halasz; Edward J. Nowak (IBM J. Res. Dev., 1995)