Early Diagnosis and Prediction of Wafer Quality Using Machine Learning on sub-10nm Logic Technology. - Heung-Kook Ko; Sena Park; Jihyun Ryu; Sung Ryul Kim; Giwon Lee; Dongjoon Lee; Sangwoo Pae; Euncheol Lee; Yongsun Ji; Hai Jiang 005; Taeyoung Jeong; Taiki Uemura; et al. (IRPS, 2020)