Interface Engineering of Trench-Ox for Modern DRAM Devices. - Soojung Hwang; Jongkyu Kim; Juntae Kim; Dahyun Cha; Minho Kim; Dongkyu Jang; Sunghak Cho; Seokhyang Kim; Jaeseong Park; Hyungjoon Kim; Sukwon Yu; Boyoung Song; et al. (IRPS, 2024)