Integration of feedback control and run-to-run control for plasma enhanced atomic layer deposition of hafnium oxide thin films. - Sungil Yun; Yangyao Ding; Yichi Zhang; Panagiotis D. Christofides (Comput. Chem. Eng., 2021)

Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor. - Matthew Tom; Sungil Yun; Henrik Wang; Feiyang Ou; Gerassimos Orkoulas; Panagiotis D. Christofides (Comput. Chem. Eng., 2022)

Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching. - Sungil Yun; Matthew Tom; Gerassimos Orkoulas; Panagiotis D. Christofides (Comput. Chem. Eng., 2022)

Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design. - Sungil Yun; Matthew Tom; Feiyang Ou; Gerassimos Orkoulas; Panagiotis D. Christofides (Comput. Chem. Eng., 2022)

Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operation. - Matthew Tom; Henrik Wang; Feiyang Ou; Sungil Yun; Gerassimos Orkoulas; Panagiotis D. Christofides (Comput. Chem. Eng., 2023)