Parallel fault simulation using distributed processing. - Ytzhak H. Levendel; Prem R. Menon; Suresh H. Patel (Bell Syst. Tech. J., 1983)

Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing. - Edward A. Rietman; Suresh H. Patel; Earl R. Lory (Comput. Oper. Res., 1996)