Impact of precursors choice on characteristics of PEALD SiN for spacer applications. - Dina H. Triyoso; Klaus Hempel; Susanne Ohsiek; Jeff Shu; Jamie K. Schaeffer; Markus Lenski (ICICDT, 2013)

ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM. - D. H. Triyoso; Wenke Weinreich; Konrad Seidel; Mark G. Nolan; Patrick Polakowski; D. Utess; Susanne Ohsiek; K. Dittmar; M. Weisheit; M. Licbau; R. Fox (ICICDT, 2014)