Fabrication Process of Nonarcing Power MEMS Switch. - Yu Yonezawa; Noboru Wakatsuki; Yoshio Satoh; Tadashi Nakatani; Koichiro Sawa (IEICE Trans. Electron., 2005)

Effect of frequency in the 3D integration of a PZT-actuated MEMS switch using a single crystal silicon asymmetric beam. - Fumihiko Nakazawa; Takeaki Shimanouchi; Tadashi Nakatani; Takashi Katsuki; Hisao Okuda; Osamu Toyoda; Satoshi Ueda (3DIC, 2011)