A Hybrid PPC Method Based on the Empirical Etch Model for the 0.14µm DRAM Generation and Beyond. - Chul-Hong Park; Soo-Han Choi; Sang-Uhk Rhie; Dong-Hyun Kim; Jun-Seong Park; Tae-Hwang Jang; Ji-Soong Park; Yoo-Hyon Kim; Moon-Hyun Yoo; Jeong-Taek Kong (ISQED, 2002)