Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology. - Nguyen Van Toan; Tomohiro Kubota; Halubai Seknar; Seiji Samukawa; Takahito Ono (NEMS, 2014)

Glass reflow process and its applications. - Nguyen Van Toan; Suguru Sangu; Takahito Ono (NEMS, 2016)

A freestanding microfluidic-based thermocouple biosensor for enzyme-catalyzed reaction analysis. - Zhuqing Wang; Mitsuteru Kimura; Naoki Inomata; Takahito Ono (NEMS, 2016)

Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process. - Nguyen Van Toan; Shim Hahng; Yunheub Song; Takahito Ono (Micromachines, 2016)

An Investigation of Processes for Glass Micromachining. - Nguyen Van Toan; Masaya Toda; Takahito Ono (Micromachines, 2016)

Microfabricated Temperature-Sensing Devices Using a Microfluidic Chip for Biological Applications. - Naoki Inomata; Masaya Toda; Takahito Ono (Int. J. Autom. Technol., 2018)

Impact of etch angles on cell characteristics in 3D NAND flash memory. - Young-Taek Oh; Kyu-Beom Kim; Sang-Hoon Shin; Hahng Sim; Nguyen Van Toan; Takahito Ono; Yunheub Song (Microelectron. J., 2018)

Magnetic Field Sensor Based on Hybrid of Magnetostrictive and Piezoelectric Materials. - Mohammad Akita Indianto; Masaya Toda; Takahito Ono (IEEE SENSORS, 2020)

A 115× Conversion-Ratio Thermoelectric Energy-Harvesting Battery Charger for the Internet of Things. - Ming-Jie Chung; Tetsuya Hirose; Takahito Ono; Po-Hung Chen (IEEE Trans. Circuits Syst., 2020)

A high-frequency narrow-band filtering mechanism based on auto-parametric internal resonance. - Rong Wang; Cao Xia; Dong F. Wang; Takahito Ono (NEMS, 2021)

Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk. - Gaopeng Xue; Masaya Toda; Xinghui Li; Takahito Ono (NEMS, 2021)

Directional Energy Transfer in a Coupled Symmetrical Multifrequency Atomic Force Microscope Cantilever. - Haiteng Ma; Shaokang Chen; Dong F. Wang; Jin Wang; Takahito Ono (IEEE Trans. Instrum. Meas., 2023)