An RF MEMS Variable Capacitor with Intelligent Bipolar Actuation. - Tamio Ikehashi; Takayuki Miyazaki; Hiroaki Yamazaki; Atsushi Suzuki; Etsuji Ogawa; Shinji Miyano; Tomohiro Saito; Tatsuya Ohguro; Takeshi Miyagi; Yoshiaki Sugizaki; Nobuaki Otsuka; Hideki Shibata; et al. (ISSCC, 2008)