Via high resistance failure analysis of LSI devices induced by multiple factors related to process and design. - Takuya Naoe; Hirotaka Komoda; Tamao Ikeuchi; Kohichi Yokoyama (Microelectron. Reliab., 2012)

Local damage free Si substrate ultra thinning for backside emission spectral analysis using OBPF for LSI failure mode detection. - Takuya Naoe; Tamao Ikeuchi; Chie Moritni; Hirohiko Endoh; Kohichi Yokoyama (Microelectron. Reliab., 2013)