Particulate failures for surface-micromachined MEMS. - Tao Jiang 028; Ronald D. Blanton (ITC, 1999)

Inductive fault analysis of surface-micromachined MEMS. - Tao Jiang 028; R. D. (Shawn) Blanton (IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 2006)