A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology. - Toshifumi Konishi; Teruaki Safu; Katsuyuki Machida; Daisuke Yamane; Masato Sone; Kazuya Masu; Hiroshi Toshiyoshi (IEEE SENSORS, 2016)

A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology. - Daisuke Yamane; Toshifumi Konishi; Teruaki Safu; Hiroshi Toshiyoshi; Masato Sone; Kazuya Masu; Katsuyuki Machida (NEMS, 2016)

Evaluation and modeling of adhesion layer in shock-protection structure for MEMS accelerometer. - Daisuke Yamane; Toshifumi Konishi; Teruaki Safu; Hiroshi Toshiyoshi; Masato Sone; Kazuya Masu; Katsuyuki Machida (Microelectron. Reliab., 2016)