Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm. - Uwe Brand; Min Xu; Lutz Doering; Jannick Langfahl-Klabes; Heinrich Behle; Sebastian Bütefisch; Thomas Ahbe; Erwin Peiner; Stefan Völlmeke; Thomas Frank; Bodo Mickan; Ilia Kiselev; et al. (Sensors, 2019)

True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor. - Jan Thiesler; Thomas Ahbe; Rainer Tutsch; Gaoliang Dai (Sensors, 2022)

Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements. - Min Xu; Ziqi Zhou; Thomas Ahbe; Erwin Peiner; Uwe Brand (Sensors, 2022)