MEMS Self-Packaged Capacitive Absolute Pressure and Force Sensors for High-Temperature Application. - Muhannad Ghanam; Thomas Bilger; Frank Goldschmidtboeing; Peter Woias (IEEE SENSORS, 2022)

MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature. - Muhannad Ghanam; Frank Goldschmidtboeing; Thomas Bilger; Andreas Bucherer; Peter Woias (Sensors, 2023)