Characterization of thin and ultra-thin SiO2 films and SiO2/Si interfaces with combined conducting and topographic atomic force microscopy. - Werner Frammelsberger; Guenther Benstetter; Thomas Schweinböck; Richard J. Stamp; Janice Kiely (Microelectron. Reliab., 2003)

AFM-based scanning capacitance techniques for deep sub-micron semiconductor failure analysis. - Günther Benstetter; Peter Breitschopf; Werner Frammelsberger; Heiko Ranzinger; Peter Reislhuber; Thomas Schweinböck (Microelectron. Reliab., 2004)

2D Dopant Profiling on 4H Silicon Carbide P+N Junction by Scanning Capacitance and Scanning Electron Microscopy. - Marco Buzzo; Markus Leicht; Thomas Schweinböck; Mauro Ciappa; Maria Stangoni; Wolfgang Fichtner (Microelectron. Reliab., 2004)

New trends in the application of Scanning Probe Techniques in Failure Analysis. - Thomas Schweinböck; S. Schömann; D. Álvarez; Marco Buzzo; Werner Frammelsberger; Peter Breitschopf; Günther Benstetter (Microelectron. Reliab., 2004)

Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling. - Roland Biberger; Guenther Benstetter; Thomas Schweinböck; Peter Breitschopf; Holger Goebel (Microelectron. Reliab., 2008)

Quantitative Scanning Microwave Microscopy: A calibration flow. - Thomas Schweinböck; Sören Hommel (Microelectron. Reliab., 2014)

Scanning Microwave Microscopy for Electronic Device Analysis on Nanometre Scale. - Sören Hommel; Nicole Killat; Andreas Altes; Thomas Schweinböck; Doris Schmitt-Landsiedel; Marco Silvestri; Oliver Haeberlen (Microelectron. Reliab., 2016)

Determination of doping type by calibrated capacitance scanning microwave microscopy. - Sören Hommel; Nicole Killat; A. Altes; Thomas Schweinböck; Franz Kreupl (Microelectron. Reliab., 2017)