TSV development for miniaturized MEMS acceleration switch. - Nicolas Lietaer; Anand Summanwar; Thor Bakke; Maaike Taklo; Per Dalsjø (3DIC, 2010)

A real-time 3D range image sensor based on a novel tip-tilt-piston micromirror and dual frequency phase shifting. - Øystein Skotheim; Henrik Schumann-Olsen; Jostein Thorstensen; Anna N. Kim; Matthieu Lacolle; Karl-Henrik Haugholt; Thor Bakke (Three-Dimensional Image Processing, Measurement (3DIPM), and Applications, 2015)

Cost-Efficient Wafer-Level Capping for MEMS and Imaging Sensors by Adhesive Wafer Bonding. - Simon J. Bleiker; Maaike M. Visser Taklo; Nicolas Lietaer; Andreas Vogl; Thor Bakke; Frank Niklaus (Micromachines, 2016)